Laser Sawing Process

- Low-K grooving
- SEM X200

- SEM X2000

- Laser full cut
- SEM X400

- SEM X100

Laser Sawing Process Flow

Kinds of LC Series
| Item | Specification | Remarks | Remark |
|---|---|---|---|
| LC-100 | LC-200 | ||
| Main Component | Polyvinyl Alcohol(PVA) | Polyvinyl pyrrolidone(PVP) | |
| Appearance | Translucent viscous Liquid | Yellowish Viscous Liquid | Visual test |
| pH (at 20℃) | 5~7 | 3~4 | pH meter Orion Star A211 |
| Sp. Gr. (at 20℃) | 1.02~1.03 | 1.01~1.02 | Hydrometer Fisher Scientific |
| Viscosity (cps at 20℃) | 30~50 | 50~70(Low vis. Ver) 150~200(High vis. Ver) |
Remarks)1 |
| Application | Low-k w/f Cu Bump w/f |
Cu Bump w/f Light device w/f(LED) |
Remarks)1 : Brookfiled Viscometer ( DV-Ⅱ +Pro, Spindle No. 2, 20rpm)
Merits of LC Series
– Less spider web defect than global competitor (Japan H-series)
– Good leveling characteristic for spin coating
– Include UV absorber for preventing SiO2 crack